Composition, structure and electrical properties of alumina barrier layers grown in fluoride-containing oxalic acid solutions
The composition, structure and electrical properties of alumina barrier layers grown by anodic oxidation in F?-containing (FC) and F?-free (FF) oxalic acid solutions were studied using the re-anodizing/dissolution technique, Fourier-transformed infrared and X-ray photoelectron spectroscopy. These results confirmed formation in FC anodizing solutions of films structurally different from ones grown in FF oxalic acid baths. It was found that the barrier layer of FC alumina films is composed of two layers differing in the dissolution rate. These differences are related to the formation in the FC electrolyte of a barrier layer composed of a more microporous outer part and a thin, non-porous and non-scalloped inner part consisting of aluminum oxide and aluminum fluoride.
A. JagminasaEmail:jagmin@ktl.mii.lt?I. Vrublevskyb?J. Kuzmarskyta?V. Jasulaitiena
[a]Institute of Chemistry, A. Gotauto 9, LT-01108 Vilnius, Lithuania;[b]Department of Microelectricals, Belarusian State University of Informatics; Radioelectricals, 6 Brovka Street, Minsk 220013, Belarus
